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| 01. 電漿洗滌機 Dry Scrubber (Plasma Trap) |
ETC Plasma Trap Superior Scrubber Performance for :
PECVD and LPCVD Nitride,TEOS and PSG/BPSG.
PECVD α-Si, SiC and LPCVD Poly Si.
LPCVD W and W Silicide.
MOCVD and LPCVD GaAS.
MOCVD Al. and MOCVD Cu.
PH3 Annealing.
PFC Abatement. |
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