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| 射頻阻抗匹配器 |
射頻阻抗匹配器 RF Matching Network
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製造廠牌Brand
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品名 Description
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型號 Model
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應用 Application
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照片 Pictures
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ENI / MKS
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OB2 Dual match
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000-1103-075
000-1103-088
660-002296-002
660-002296-004
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Lam2300 Flex / Flex 45
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ENI / MKS
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OB1 Dual Match
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000-1134-075R
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Lam2300 Exelan
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LAM Research
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TCP match
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853-032294-002
853-032294-003
853-032294-004
853-032294-603
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TCP 9600 /9400
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LAM Research
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Top match
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853-032190-008
853-032190-006
853-032190-306
853-031685-001
853-031685-002
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TCP 9600
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LAM Research
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Mini match
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853-330951-021
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TCP 9600 / 9400
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LAM Research
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Mini match
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853-025083-001
853-025083-002
853-025083-003
853-025083-004
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TCP 9600 / 9400
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LAM Research
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Mini match
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853-015130-002
853-015130-003
853-015130-004
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4420 / 4720
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LAM Research
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Upper match
(mini match)
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853-015130-103
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4420 / 4720
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LAM Research
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Autotune Lofat Match
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853-025903-001
853-025903-002
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4520
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LAM Research
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DFM Mini match
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853-250001-023
853-250001-024
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TCP9400 DFM
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LAM Research
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DSQ match
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853-025735-001
853-025735-002
853-025735-003
853-025735-004
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TCP 9600 stripper
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Trazar
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Dome match
SRN1-2
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27-132651-00
27-045983-00
02-255013-00
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Novellus
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Trazar
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Bias Match
AMU10E
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27-118072-00
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Novellus
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Trazar
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Bias Match
AMU2-1
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27-032653-00
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Novellus
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Trazar
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AMU10D
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914-092003-00
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Mattson
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Trazar
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RFS1000
(RF Service)
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9900-0003-15
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Mattson
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ASM
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ASM Match
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93000-00981
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ASM
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ENI / MKS
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MW2-30 match
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ID80-005356-13
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TEL Etch
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ENI / MKS
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MWD-25LD-02
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1D80-0003338-12
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TEL Etch
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ENI / MKS
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MWD-25LD-06
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ID80-090002-11
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TEL Etch
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ENI / MKS
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MWH-5-01M2
MWH-5-02
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Etch
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AE / RFPP
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AM-5
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315008-001
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Etch
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AE / RFPP
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AM-10
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3150117-002
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Etch
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AE / RFPP
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AM-20
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3150117-003
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Etch
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AE
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Mercury 3013
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3150274-004
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Novellus
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